Folús córais tá aicmithe de réir go a a n- oibriú brú

An folús córas tá rangaithe de réir a a ag obair brú % 2c a is féidir a roinnte i % 3a 1) amh bhfolús córas (obair brú níos mó ná 133% 7b % 7b4% 7d% 7dPa ) % 3b 2) Íseal agus meán folús córas (ag obair brú 13 % 7b 7 % 7 % 7 . 13 % 7 % 7b 7 % 7b% 7b11% 7d % 7dPa ) % 3b 4) Ultra-ard folús córas (ag obair brú is 1.3% c3% 97% 7b% 7b% 7b% 7b16% 7d% 7dPa ~ 1.3×10-10Pa); 5) Thar a bheith ard folús córas (ag obair brú thíos 1.3% c3% 97% 7b% 7b23% 7d% 7dPa).

According to the cleanliness required by the vacuum system, it can be divided into: 1) there is an oil vacuum system (the vacuum chamber has oil vapor pollution); 2) Oil-free vacuum system (vacuum chamber without oil vapor pollution).

IKS PVD cuideachta% 2c maisiúil sciath meaisín % 2c uirlisí sciath meaisín % 2c DLC sciath meaisín % 2c optúil sciath meaisín % 2c PVD folús sciath líne% 2c an cas-eochair tionscadal tá ar fáil. Teagmháil linn anois% 2c R-phost % 3a % 7b % 7b2% 7d% 7d